Influence of Ion Incidence Angle on the Implantation Characteristics of 60 keV Oxygen Ions in Aluminium: A SRIM/TRIM Simulation Study. LEP [Internet]. 2026 Aug. 6 [cited 2026 Aug. 7];18(12):2394-400. Available from: https://sibe.rpress.co.in/index.php/jimr/article/view/948